An Ultra-Sensitive PMUT Exploiting High Order Mode for Long Distance Airborne Ranging

This paper introduces an innovative airborne piezoelectric micromachined ultrasonic transducer (PMUT) featuring a frequency of 4.15 MHz with high transmission sensitivity up to 80.4 nm/V. By employing a triple-ring-shaped electrode configuration, the device maximizes displacement at the (0,3) mode, enhancing both directivity and frequency without sacrificing sensitivity. The experimental results demonstrate a tenfold increase in frequency alongside a 44.1 % improvement in sensitivity compared to traditional designs. These advancements make this PMUT highly suitable for applications requiring high sensitivity, frequency, and directivity, such as portable airborne ranging systems.