ATO Thin-Film Strain Gauge: A Breakthrough in Ultra-High-Temperature Sensing

This paper presents a novel antimony-doped tin dioxide (ATO) thin-film strain gauge (TFSG) designed for strain measurement in ultra-high-temperature environments. Through systematic experimentation, the optimal fabrication conditions were identified as a sputtering atmosphere with an argon-to-oxygen (Ar/0<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>) ratio of 40:0, annealing in a nitrogen (N<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>) atmosphere, and an annealing temperature of 800°C. Under these conditions, the resistance change rate of the ATO TFSG decreases with increasing temperature. However, between 600°C and 700°C, the resistance change rate temporarily increases before resuming its decline, likely due to phase transitions and oxygen diffusion. Additionally, the ATO TFSG demonstrates exceptional sensitivity and stability, with a gauge factor (GF) of -5.47.