High-Performance Solidly Mounted Bidimensional Mode Resonators (S2MRs) Operating Around 16 GHz

This paper reports on Solidly-Mounted Bidimensional Mode Resonators (S2MRs) utilizing 30% Scandium-doped Aluminum Nitride (ScAlN) on Silicon Carbide (SiC), operating near 16 GHz. Experimental results show mechanical quality factors <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(Q_{m})$</tex> up to 380, electromechanical coupling coefficients <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(k_{t}^{2})$</tex> of 4%, and an overall Figure of Merit <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(F0M=Q\cdot k_{\tau}^{2})$</tex> exceeding 15. Additionally, <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$Q_{Bode}$</tex> calculation is reported along with an analysis of the piezoelectric energy confinement coefficient <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\eta$</tex> showing the impact of thickness-to-wavelength ratio <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(h/\lambda)$</tex> on the acoustic wave confinement. Finally, the devices demonstrate power handling capabilities greater than 20 dBm while achieving close impedance matching to <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$50 \Omega$</tex>. These features make them strong candidates for commercial, military, and harsh-environment applications like satellite communications (SATCOM) and Active Electronically Scanned Arrays (AESA).