Integrated Diamond Magnetometer for Vector Magnetic Measurement

In this research, we present a hermetically sealed integrated diamond magnetometer for vector magnetometry. The diamond chip, fabricated using standard microfabrication processes, has a volume of 0.1 cm3. The case integrates five essential components for driving quantum state detection, including laser diode, microwave antenna, diamond chip, long-pass filter, and photodiode, with an overall volume of 2.72 cm3, The integrated diamond magnetometer achieved a magnetic sensitivity of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$2.62\ \text{nT}\cdot \text{Hz}^{-1/2}$</tex>, and enables real-time measurement and reconstruction of the spatial vector magnetic tensor by leveraging the inherent crystallographic axes of the diamond. The highly integrated sensor with all electrical 10 paves the way towards industrial applications.