High Aspect Ratio 3D Carbon Microstructure for Infrared Emitter Using Parylene Carbonization

In this work, we propose a novel fabrication method for a self-suspended high-aspect-ratio carbon microstructures for the infrared emitter. The fabrication process consists of a lost-mold technique to form a parylene high-aspect-ratio structure and caronization at a elevated temperature. The Raman spectra and electrical measurement indicate that the carbon structure could be successfully obtained by the proposed method. The emissivity of the carbon film was measured at 0.7. The self-suspended carbon microstructure could be successfully operated at the temperature as high as 900°C, which correspond to an infrared peak wavelength of 2.5 <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\mu \mathrm{m}$</tex>.