Wafer-Scale Platform of PLZT on $\text{SiO}_{2}/ \text{Si}$ Substrate Toward Realizing High-Speed Optical Modulation
Lanthanum doped lead zirconate titanate (PLZT) deposited on <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{SiO}_{2}/ \text{Si}$</tex> wafer was suggested as a new platform for fabricating optical modulators. This enabled a high-speed Mach-Zehnder modulator with <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$V_{\pi} L=1.3 \mathrm{V} \cdot \text{cm}$</tex>.
Authors
- Tomohiro Otani (ORCID: https://orcid.org/0000-0002-3780-7348)
- Sohei Nonaka
- Shiyoshi Yokoyama (ORCID: https://orcid.org/0000-0002-0434-9950)
Institutions
- Kyushu University (JP)
- Mitsubishi Materials (Japan) (JP)
Publication Details
- Published
- 2025-06-29
- DOI
- https://doi.org/10.23919/oecc/psc62146.2025.11109661
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00