2D Pattern Projection for Mode Coupling Analysis in Gimbal-Less Piezo-Actuated Resonant Scanning Micromirrors

We report a systematic method to characterize and quantify mode coupling in 2D MEMS resonant micromirrors. We specifically studied a gimbal-less design that has the advantage of a small footprint with respect to other structures. However, such designs are known for mode coupling inducing complex driving schemes. In this work, we demonstrated that the effect of the slow axis (SA) scan angle on the fast axis (FA) behavior is very limited while we observe an influence of the FA scan angle on the SA performance. First investigations suggest a significant decrease of the SA resonance and efficiency with the increase of FA actuation amplitude. A better understanding of mode coupling in 2D scanning micromirrors could foster integration of such devices in numerous size-critical optical systems.