Design and Implementation of Dual-Axis Piezoelectric MEMS Mirror for Image Aspect-Ratio Switching

This study extends the reference design in [1] to realize a dual-axis MEMS scanning mirror with two driving methods for image aspect-ratio switching. The proposed design features three merits: (1) Inner/outer actuators connected by meander spring: increase output displacement and scanning angle; (2) Transmission spring: enhance the flexibility for dual-axis rotation; (3) Electrical routings for actuators: allow multiple phase driving signals (0°, 180°) for actuation output enhancement, offer two actuation methods for image aspect-ratio switching (Fig. 1d). Measurement demonstrates the scanner achieves 108-degree optical scanning angle at 3.28kHz in x-axis <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(12\mathrm{V}_{\text{pp}})$</tex> and 25-degree at 7.14kHz in y-axis <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(10\mathrm{V}_{\text{pp}})$</tex>. Images with two aspects-ratios, 7:5 and 11:2, are achieved by two driving methods.