Silicon Oxynitride/Silicon Interlayer Couplers: Flexible Index Control, High Efficiency and Compact on Silicon Platform
Two types of high-efficiency and compact interlayer couplers, directional and inverse taper couplers, for multilayer photonic circuits using silicon oxynitride on silicon platform were proposed and fabricated. Over 80% coupling efficiencies were achieved for both structures.
Authors
- Nobuhiko Nishiyama (ORCID: https://orcid.org/0000-0001-8288-6690)
- Kaiyuan Yao (ORCID: https://orcid.org/0000-0001-7660-8301)
- Moataz Eissa (ORCID: https://orcid.org/0000-0002-4339-2724)
- Tsuyoshi Horikawa
Institutions
- Tokyo Institute of Technology (JP)
Publication Details
- Published
- 2025-06-29
- DOI
- https://doi.org/10.23919/oecc/psc62146.2025.11111237
- Primary Topic
- Semiconductor materials and devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- New Energy and Industrial Technology Development Organization