Highly Accurate Wide-Range MEMS Hybrid Vacuum Sensor with Highly Accurate Gas Identification

This work reports a wide range high accuracy MEMS hybrid vacuum sensor with gas species identification. The sensor integrates MEMS Pirani and MEMS piezoresistive and achieves 0.05~10<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sup> Pa vacuum range with high accuracy (2%@104 Pa~10<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sup> Pa,5%@0.05 Pa~10<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</sup> Pa). In addition, An innovative GAF-CNN gas identification algorithm is proposed based on dual-chip data, and the experimental results show that it can effectively distinguish various common gas types under vacuum environment with high accuracy (99.14%), including nitrogen, helium, argon and carbon dioxide.