Thermally Matched Twin for Accurate Bandwidth Scaling in Uncooled Nanoelectromechanical IR Sensor

This paper presents a novel approach for accurately measuring and characterizing the thermal time constant of tethered piezoelectric nanoplate resonators. The developed Thermally Matched Twin Nanoplate (TMTN) microheater mimics the thermal behavior of the ultra-fast AlScN-based optomechanical tethered nanoplate resonators. It enables accurate characterization of the bandwidth of infrared (IR) response. The experimental thermal time constant of TMTN matches very closely with analytical models, which predicts the feasibility of 10kHz IR detection bandwidth for optimized resonator heterostructure and resonator (pixel) geometry.