Monolithically Integrated CMOS-MEMS Microcantilever Gas Sensor with Sub-10 Milliwatt Power Consumption

This paper presents, for the first time, the monolithic integration of a microcantilever gas sensor with CMOS circuits. The microcantilever-based microplate and optimized gas-sensitive material deposition method enables the integrated sensor to achieve hydrogen detection at sub-10 ppm levels with power consumption below 10 mW. This work utilizes <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$0.18\mu \mathrm{m}$</tex> 1P3M standard CMOS process and a post-CMOS process to fabricate the integrated sensors. The proposed post-CMOS process, fully compatible with CMOS process, enables mass production of monolithically integrated gas sensors. This monolithic integration approach shows potential applicability in smart gas sensing for long-term deployment.