Investigation of Thermo-Optic Phase Shifters for a 500-nm-Thick Silicon on Insulator Platform

We investigate a thermo-optic phase shifter on an SOI platform with 500 nm Si and <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$1 \mu ~\mathrm{m}\ B O X$</tex>, which exhibits a <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$P_{\pi}$</tex> value of 54.7 mW and a response time of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$7 \mu ~\mathrm{s}$</tex>.

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Publication Details

Published
2025-06-29
DOI
https://doi.org/10.23919/oecc/psc62146.2025.11110342
Primary Topic
Photonic and Optical Devices
Type
article
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article

Investigation of Thermo-Optic Phase Shifters for a 500-nm-Thick Silicon on Insulator Platform

Min-Suk Kwon, Jihoon Seo, Jungwoo Lee
Photonic and Optical Devices
article

Investigation of Thermo-Optic Phase Shifters for a 500-nm-Thick Silicon on Insulator Platform

Min-Suk Kwon, Jihoon Seo, Jungwoo Lee
article en

Abstract

We investigate a thermo-optic phase shifter on an SOI platform with 500 nm Si and <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$1 \mu ~\mathrm{m}\ B O X$</tex>, which exhibits a <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$P_{\pi}$</tex> value of 54.7 mW and a response time of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$7 \mu ~\mathrm{s}$</tex>.

Ulsan National Institute of Science and Technology (KR)
Affordable and clean energy
Openalex Percentile: Top 80%
Photonic and Optical Devices
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