Pulsed laser-assisted direct fabrication of MoxW1-xS2 alloy-based flexible strain sensors with superior performance for high-temperature applications
Flexible strain sensors with high sensitivity and stability at high temperatures are significantly desirable for their accurate and long-term signal detection in wearable devices, environment monitoring, and aerospace electronics. Despite the considerable efforts in materials development and structural design, it remains a challenge to develop highly sensitive, flexible strain sensors operating at high temperatures due to the trade-off between sensitivity and stability for the representative sensing materials. Herein, we develop a high-temperature flexible sensor using Mo<sub>x</sub>W<sub>1-x</sub>S<sub>2</sub> alloy films. A pulsed laser is introduced to directly synthesize Mo<sub>x</sub>W<sub>1-x</sub>S<sub>2</sub> patterns with controllable compositions and physical parameters, enabling the realization of flexible sensors without photolithography or transfer procedures. The resultant flexible sensors exhibit a high gauge factor of 97.4, a low strain detection of 4.9 με, and strong tolerance to a temperature of 500 °C. Owing to its superior performance, we develop a wireless acoustic recognition system to distinguish tiny strain signals of tuning forks with a vibration frequency up to 128 Hz under extreme temperature conditions. The laser method for the direct fabrication of Mo<sub>x</sub>W<sub>1-x</sub>S<sub>2</sub> alloy-based flexible sensors holds great potential in the precise detection of strain signals from complex structures at high temperatures.
Authors
- Hanxin Wang (ORCID: https://orcid.org/0000-0001-9408-1750)
- Yilin Zhou (ORCID: https://orcid.org/0000-0002-6522-6655)
- Manzhang Xu (ORCID: https://orcid.org/0000-0001-6752-5299)
- Lu Zheng (ORCID: https://orcid.org/0000-0002-4766-8062)
- Wei Huang (ORCID: https://orcid.org/0000-0001-7004-6408)
- Weiwei Li (ORCID: https://orcid.org/0000-0002-2149-3997)
- Xiaoshan Zhang (ORCID: https://orcid.org/0000-0003-4216-4209)
- Xuewen Wang (ORCID: https://orcid.org/0000-0002-9689-6678)
- Yingzhe Li (ORCID: https://orcid.org/0000-0003-1818-2140)
- Kexin Wang (ORCID: https://orcid.org/0009-0003-3891-1539)
Institutions
- Nanjing Tech University (CN)
- Northwestern Polytechnical University (CN)
- Henan University (CN)
- Nanjing University of Posts and Telecommunications (CN)
- Henan Institute of Education (CN)
Publication Details
- Journal
- Microsystems & Nanoengineering
- Published
- 2025-08-19
- DOI
- https://doi.org/10.1038/s41378-025-01014-1
- Citations
- 1
- Primary Topic
- Gas Sensing Nanomaterials and Sensors
- Type
- article
- Field-Weighted Citation Impact
- 0.73
Funders
- National Natural Science Foundation of China