Pulsed laser-assisted direct fabrication of MoxW1-xS2 alloy-based flexible strain sensors with superior performance for high-temperature applications

Flexible strain sensors with high sensitivity and stability at high temperatures are significantly desirable for their accurate and long-term signal detection in wearable devices, environment monitoring, and aerospace electronics. Despite the considerable efforts in materials development and structural design, it remains a challenge to develop highly sensitive, flexible strain sensors operating at high temperatures due to the trade-off between sensitivity and stability for the representative sensing materials. Herein, we develop a high-temperature flexible sensor using Mo<sub>x</sub>W<sub>1-x</sub>S<sub>2</sub> alloy films. A pulsed laser is introduced to directly synthesize Mo<sub>x</sub>W<sub>1-x</sub>S<sub>2</sub> patterns with controllable compositions and physical parameters, enabling the realization of flexible sensors without photolithography or transfer procedures. The resultant flexible sensors exhibit a high gauge factor of 97.4, a low strain detection of 4.9 με, and strong tolerance to a temperature of 500 °C. Owing to its superior performance, we develop a wireless acoustic recognition system to distinguish tiny strain signals of tuning forks with a vibration frequency up to 128 Hz under extreme temperature conditions. The laser method for the direct fabrication of Mo<sub>x</sub>W<sub>1-x</sub>S<sub>2</sub> alloy-based flexible sensors holds great potential in the precise detection of strain signals from complex structures at high temperatures.

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Publication Details

Journal
Microsystems & Nanoengineering
Published
2025-08-19
DOI
https://doi.org/10.1038/s41378-025-01014-1
Citations
1
Primary Topic
Gas Sensing Nanomaterials and Sensors
Type
article
Field-Weighted Citation Impact
0.73

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article

Pulsed laser-assisted direct fabrication of MoxW1-xS2 alloy-based flexible strain sensors with superior performance for high-temperature applications

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1 citations
Microsystems & Nanoengineering
Gas Sensing Nanomaterials and Sensors
0.73
article

Pulsed laser-assisted direct fabrication of MoxW1-xS2 alloy-based flexible strain sensors with superior performance for high-temperature applications

Hanxin Wang, Yilin Zhou, Manzhang Xu, Lu Zheng, Wei Huang, Weiwei Li, Xiaoshan Zhang, Xuewen Wang, Yingzhe Li, Kexin Wang
article en
1 citations

Abstract

Flexible strain sensors with high sensitivity and stability at high temperatures are significantly desirable for their accurate and long-term signal detection in wearable devices, environment monitoring, and aerospace electronics. Despite the considerable efforts in materials development and structural design, it remains a challenge to develop highly sensitive, flexible strain sensors operating at high temperatures due to the trade-off between sensitivity and stability for the representative sensing materials. Herein, we develop a high-temperature flexible sensor using Mo<sub>x</sub>W<sub>1-x</sub>S<sub>2</sub> alloy films. A pulsed laser is introduced to directly synthesize Mo<sub>x</sub>W<sub>1-x</sub>S<sub>2</sub> patterns with controllable compositions and physical parameters, enabling the realization of flexible sensors without photolithography or transfer procedures. The resultant flexible sensors exhibit a high gauge factor of 97.4, a low strain detection of 4.9 με, and strong tolerance to a temperature of 500 °C. Owing to its superior performance, we develop a wireless acoustic recognition system to distinguish tiny strain signals of tuning forks with a vibration frequency up to 128 Hz under extreme temperature conditions. The laser method for the direct fabrication of Mo<sub>x</sub>W<sub>1-x</sub>S<sub>2</sub> alloy-based flexible sensors holds great potential in the precise detection of strain signals from complex structures at high temperatures.

Microsystems & NanoengineeringVol. 11(1)
Nanjing Tech University (CN), Northwestern Polytechnical University (CN), Henan University (CN), Nanjing University of Posts and Telecommunications (CN), Henan Institute of Education (CN)
National Natural Science Foundation of China
Affordable and clean energy
Openalex Percentile: Top 25%
Gas Sensing Nanomaterials and Sensors
0.73
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