Three-dimensional Atomic Arrangement of Dopants and Interfaces Measured by Photoelectron Holography

Doping materials and forming thin films are essential techniques in modern science and technology. However, observing the three-dimensional atomic structures of dopants and thin film interfaces has been difficult using conventional technics. Recently, atomic-resolution holography has been developed as a powerful technique for directly visualizing such three-dimensional local atomic arrangements. Among various types, photoelectron holography is particularly advantageous due to its high surface sensitivity. its ability to detect light elements, and its capability for atomic site identification. This paper introduces the principles and applications of photoelectron holography.