Absolute testing for cylindrical surface
Cylindrical surfaces are typically inspected using null-testing relative interferometry. This paper proposes an absolute testing for cylindrical surfaces by conducting three testing at distinct configurations: focal line position, confocal position, and 180° rotated confocal position. The measured phase data are fitted using orthogonal Chebyshev polynomials, and the absolute surface figure is determined through solving a equation matrix established based on the inherent flip-symmetry characteristics of the polynomial basis. This approach effectively eliminates systematic errors inherent in conventional interferometric testing, enabling high-precision absolute characterization of cylindrical surfaces without requiring additional reference optics.
Authors
- Wujun Lv (ORCID: https://orcid.org/0000-0002-9760-2926)
- Ying Yang (ORCID: https://orcid.org/0000-0001-6009-4748)
- Sen Han (ORCID: https://orcid.org/0000-0003-1671-3083)
- Chunfeng Xu (ORCID: https://orcid.org/0009-0007-4343-7770)
- Hao Sun (ORCID: https://orcid.org/0000-0002-7659-7339)
- Yuhang Shen
- Liwei Zhang
Institutions
- Changchun University of Science and Technology (CN)
- University of Shanghai for Science and Technology (CN)
Publication Details
- Published
- 2025-08-11
- DOI
- https://doi.org/10.1117/12.3063049
- Primary Topic
- Advanced Measurement and Metrology Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00