Nanolithographic Waveguides, Couplers and Ring Resonators made of Si<sub>3</sub>N<sub>4</sub> and AIN for Photonics and Quantum Technologies
Photonic integrated functionalities based on silicon nitride ($\mathrm{Si}_{3} \mathrm{~N}_{4}$) and aluminum nitride (AlN) fabricated and characterized on wafer level are presented here. The design comprises waveguides, couplers, and rings for C-band and L-band applications. Propagation losses of $0.25 \mathrm{~dB} / \mathrm{cm}$ for LPCVD-Si ${ }_{3} \mathrm{~N}_{4}, 0.6 \mathrm{~dB} / \mathrm{cm}$ for ICPCVD-Si3N4 and $1 \mathrm{~dB} / \mathrm{cm}$ for PECVD-Si N<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</inf> were achieved. Wafer level characterization shows grating couplers with a measured maximum coupling coefficient in the range of -13.92 dB to -16.03 dB over the whole wafer. Moreover, ring resonances with quality factors higher than $19000\left(\mathrm{Si}_{3} \mathrm{~N}_{4}\right)$ and $3000(\mathrm{AlN})$ for $25 \mu \mathrm{~m}$ ring radius were achieved.
Authors
- Anne-Katrin Schumann
- Karla Hiller (ORCID: https://orcid.org/0000-0003-2686-6788)
- Roman Forke (ORCID: https://orcid.org/0000-0003-4293-2060)
- Chris Stöckel
- Sebastian Schermer (ORCID: https://orcid.org/0000-0002-1493-7465)
- Micha Haase (ORCID: https://orcid.org/0000-0002-6333-2390)
- Danny Reuter (ORCID: https://orcid.org/0000-0003-4062-3192)
- Alexey Shaporin (ORCID: https://orcid.org/0009-0005-9214-3571)
- Julia Wecker (ORCID: https://orcid.org/0000-0001-6898-0357)
- Christian Helke (ORCID: https://orcid.org/0000-0003-4876-6905)
- Jörg Martin
- Alexander Weiβ
Institutions
- Chemnitz University of Technology (DE)
- Fraunhofer Institute for Electronic Nano Systems (DE)
Publication Details
- Published
- 2025-04-08
- DOI
- https://doi.org/10.1109/ssi65953.2025.11107193
- Citations
- 1
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.73
Funders
- Ministry of Education