Universal PMUTS – Piezoelectric Micromachined Ultrasonic Transducers With An Automatic Wire Bond Process For Adaptive Acoustic Channels

This work aims to develop novel piezoelectric micromechanical ultrasound transducers (PMUTs) that are costeffective, rapidly produced, and adaptable for various applications. Utilizing silicon-based membranes and an active piezo layer of aluminum nitride (AIN), these PMUTs can generate ultrasound waves and measure acoustic signals across a broad frequency range. Wafer-level microtechnologies enable scalable production of highly miniaturized structures and devices. The novelty of this research is the technology platform that facilitates the fabrication of custom chips with adaptive acoustic channel geometries and arbitrary chip dimensions.