Noise-robust multi-fringe decomposition for high-precision wavefront measurement in dual-lateral shearing interferometry

This study presents a single-frame multi-fringe decomposition algorithm for dual-lateral shearing interferometry, which effectively suppresses mode aliasing and reduces interferogram noise. The proposed technique advances interferometric analysis through its unique ability to directly decompose superimposed fringe patterns while preserving phase integrity. Through comprehensive numerical simulations, the algorithm demonstrates superior performance compared to conventional methods, particularly in reducing wavefront reconstruction errors. Experimental validation using a deformable mirror monitoring system confirms both the high precision and practical advantages of our method, demonstrating wavefront reconstruction accuracy below 0.3 µm in peak-to-valley (PV) error and 0.07 µm in root-mean-square (RMS) error, representing 55% and 52% improvements, respectively, over conventional approaches. The demonstrated computational efficiency and robustness of this technique highlight its significant potential for real-time measurement applications in advanced optical metrology systems, offering improved precision in real-time wavefront analysis compared to existing approaches.