Effect of cathode distance on edge electrolytic corrosion in through-mask electrochemical micromachining

Abstract Through-mask electrochemical micromachining faces the challenge of accelerated edge electrolytic corrosion during the processing of surface texture. This study investigates the influence of cathode distance, defined as the horizontal distance between the copper clad laminate mask cathode and the edge of the insulating layer, on the electric field edge effect. A simulation model of electrolytic corrosion is established based on the Laplace equation and the Butler-Volmer equation, revealing the effect of cathode distance on the distribution of anode overpotential and the morphology of the grooves. Using an experimental fixture with a straight-channel flow channel and its corresponding machining setup, the influence of cathode distance on the morphology of edge electrolytic corrosion is investigated. The findings of both theoretical and experimental research indicate that an increase in cathode distance to 400 μm results in a decrease in the intensity of anode surface overpotential. This leads to a reduction in edge electrolytic corrosion depth of more than 45%. The results of this study provide a theoretical and technical foundation for the improvement of surface texture quality.