Nanoparticle-Enhanced Color Conversion Efficiency of Hybrid Materials for Ultrahigh-Resolution Micro-Led Displays

Micro-LEDs represent a crucial advancement in next-generation display technology. However, their development still faces challenges such as achieving high-quality mass transfer and addressing the instability of quantum dotbased color conversion materials in harsh environments. This study presents an innovative solution by developing a non-toxic, environmentally stable organic-inorganic hybrid material, combined with semiconductor-processing techniques to achieve high-performance color conversion, replacing conventional mass transfer processes. Furthermore, the Micro-LED array pixel size has been reduced from <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$4 \mu \mathrm{m}$</tex> to <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$1.4 \mu \mathrm{m}$</tex>, with the color conversion layer thickness optimized to match the pixel size, minimizing color crosstalk. The incorporation of nanoparticles further enhances color conversion efficiency. As a result, we successfully fabricated ultra-high-resolution color conversion microarrays, achieving a monochrome resolution of 11,548 PPI and a full-color resolution of 5,774 PPI. The pixel size is as small as <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$1.4 \times 1.4 \mu \mathrm{m}$</tex>, with a conversion layer thickness of only <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$1.5 \mu \mathrm{m}$</tex>. The green and red conversion efficiencies reach 77.9 % and 63.3 %, respectively, while the overall color gamut coverage (DCI-P3 standard) is as high as 97.34 %. Compared to conventional mass transfer techniques, the proposed color conversion approach offers significantly lower production costs and higher manufacturing efficiency, providing a groundbreaking direction for the advancement of Micro-LED display technology.