Nanofabrication of SiNW Sensors with Au and Ag

This work investigates gold and silver-metal-deposited silicon nanowire (SiNW)-based nanosensor devices for sensor applications, focusing on stability, sensitivity, and reaction time. Metal-deposited SiNW-based nanosensor devices made of gold (Au) or silver (Ag) have generated broad interest due to their unique properties, including a high surface-to-volume ratio and exceptional electrical conductivity. Gold and silver have excellent conductivity and chemical stability, making them ideal for establishing contact between nanowires and devices. The electrical conductivity, durability, and selectivity of the nanosensor devices were evaluated in various environments, followed by the examination of target molecules, such as gases or biomolecules. Based on the metal deposition, silver-deposited devices show a superior response rate, but gold-deposited devices exhibit better response rates with high stability. This comparison study offers valuable insights into the optimization and evaluation of metal contact in sensor devices for industrial and environmental applications.