Multi-Probe Measurement Method for Error Motion of Precision Rotary Stage Based on Reference Plate

The error motion of the precision rotary stage, particularly the tilt error motion, significantly influences the accuracy of machining and measuring equipment. Nonetheless, reliable and effective in situ measurement methods for tilt error motion are still limited. Based on the analysis of the conventional three-probe measurement method, this paper proposes a multi-probe measurement method using an ultra-precision reference plate with high-resolution displacement sensors. This method employs principles and methods to avoid harmonic suppression issues through optimal probe designs, enabling simultaneous quantification of tilt and axial error motions via error separation. Error separation techniques can effectively decouple motion errors from artifact form error, making them widely applicable in precision measurement data processing. Experimental validation confirmed that the synchronous measurement error is not greater than 4.69%, consequently affirming the metrological efficacy and reliability of the method. This study provides an effective method for real-time error characterization of rotary stages.