Analysis of high precision detection technique based on optical MEMS accelerometer with double gratings

A high precision detection technique is analyzed based on the optical micro electro-mechanical system (MEMS) accelerometer with double gratings for noise suppression and scale factor enhancement. The brief sensing model and modulation detection model are built using the phase sensitive detection, and the relationship between stimulated acceleration and system output is given. The schematics of gap modulation and light intensity modulation are analyzed respectively, and the choice of modulation frequency in the optical MEMS accelerometer system is discussed. According to the experimental results, the scale factor is improved from 15.45 V/g with the gap modulation to 18.78 V/g with the light intensity modulation, and the signal to noise ratio is improved from 42.95 dB to 81.73 dB. The overall noise level in the optical MEMS accelerometer is effectively suppressed.