Multifunctional coherence scanning interferometric microscopy and measuring techniques

In the manufacturing process of advanced optical components and logic and memory chips, the geometric and optical properties of materials such as surface topography, reflectivity and refractive index, and film thickness may determine the functions, performances, and yields of optical and electronic parts. Coherence scanning interferometry (CSI) is one of the most accurate surface measuring technologies, with the characteristics of low noise level, high efficiency and non-contact measurement. Through precise and quantitative modelling of three-dimensional (3D) interferometric microscopy, we have developed a multi-functional imaging and measurement technology based on classical CSI instrument, which allows high-precision surface topography measurement, focus variation microscopy, microscale reflectance spectrum measurement, and thin film measurement without changing the hardware configuration of the instrument.