100 MHz SPML-OCT for high-throughput inspection

Optical coherence tomography (OCT) is a non-invasive, high-resolution imaging modality widely used in nondestructive testing. With its high-speed exceeding tens of megahertz, the SPML-OCT provides a promising OCT platform for widefield, high-throughput three-dimensional (3D) inspection. In this work, we present an ultrahigh-speed OCT imaging system incorporating a 100MHz SPML laser, a polygon scanner with a 25 kHz scan rate, and a motorized translation stage. Using this system, we successfully imaged a resolution target over a 16.3mm × 75mm field of view and an entire micro-SDHC card (15mm × 10mm) in 0.5 seconds and 0.08 seconds, respectively. These results demonstrate a potential of the ultrahigh-speed SPML-OCT for efficient and high-throughput industrial inspection.