Determination of the optical constants of Al2O3 and their uncertainty budget according to the international metrological standards (Conference Presentation)

In this contribution, we demonstrate a method to determine the optical constants of materias and their uncertainties from spectroscopic ellipsometry data. Using Al2O3 as a test system, we measured the ellipsometric angles at several energies between 2eV and 30 eV and several incidence angles and fitted the data making no assumption on the physical properties of the material. We show how we corrected for systematic measurement errors and determined the full uncertainty budget taking into account residual experimental inaccuracies, the angular resolution of the analyser and the energy resolution of the beam.