Edge Coupled DC-60GHz Differential SPDT MEMS Switch for High-Speed Digital Applications

This paper introduces an edge-coupled differential SPDT MEMS switch for high-speed digital applications over 100 Gbps. Built on an 8 -inch fused silica wafer and hermetically sealed with a fused silica cap, it supports <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{DC}-60 \text{GHz}$</tex> operation. The ohmic contact switch design achieves <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$&lt;1 \text{dB}$</tex> differential insertion loss up to 60 GHz, with <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$&gt;15 \text{dB}$</tex> differential return loss and 20 dB differential isolation.