A Microwave Plasma Jet Array Based on SIW-Enabled Evanescent-Mode Cavity Resonator Technology

This work presents a novel approach for scaling cold plasma generation using an SIW-based evanescent-mode (EVA) cavity resonator. The design leverages the EVA resonators' inherent electric-field concentration properties to facilitate the transition from a microscale plasma jet into a microplasma jet array. Background gas flowing through the microgap via strategically designed gas channels experiences efficient ionization owing to this field enhancement, resulting in power-efficient cold plasma jets. Four central post vias are employed as gas flow channels to facilitate plasma formation in the presence of a high electric field to achieve an array of plasma. A 3D-printed structure facilitates the flow through these channels, ultimately generating an array of four microplasma jets that exit the PCB technology-based SIW EVA resonator with as little as 800 mW of input microwave power. This work demonstrates the potential of EVA resonators for large-volume plasma jets essential for various industrial and space applications.