25 nm-Feature, 104-aspect-ratio, 10 mm2-area single-pulsed laser nanolithography
One of the major challenges in the rapidly advancing field of nanophotonics is creating high-aspect-ratio nanostructures over large-area with consistent precision. Traditional techniques like photolithography and etching fall short, being limited to fabricating structures with a typical feature size of 100 nm and a maximum aspect ratio of 30:1. To break through these barriers, herein we introduce a strategy, called wet-chemical etching assisted aberration-enhanced single-pulsed femtosecond laser-supplemented nanolithography (WEALTH), for manufacturing large-area deep holey nanostructures. This strategy enables fabrication of nanostructures with diameters as small as 25 nm (exceeding 1/30 of Abbe's diffraction limit), aspect ratios greater than 10<sup>4</sup>:1, and large-area holey lattices spanning 10 mm<sup>2</sup> with potential scalability up to several cm<sup>2</sup>. We have successfully harnessed this technique to develop cutting-edge applications, including immunoassay biosensing chips, large-area nanophotonic crystals, nanophotonic crystal microcavities, and chiral nanophotonic devices. Moreover, it is adaptable to a wide range of materials, including crystals, glasses, and silicon-based semiconductors. Our approach offers high flexibility in customizing large-area holey nanophotonic structures, paving the way for breakthrough advancements in 3D integrated optics.
Authors
- Jianrong Qiu (ORCID: https://orcid.org/0000-0003-3148-2500)
- Jingyu Zhang (ORCID: https://orcid.org/0000-0003-4457-1860)
- Huijiao Ji
- Zhijun Ma (ORCID: https://orcid.org/0000-0002-1467-6752)
- Guoping Dong (ORCID: https://orcid.org/0000-0002-8498-1226)
- Giuseppe Barillaro (ORCID: https://orcid.org/0000-0001-6197-4851)
- Beibei Xu (ORCID: https://orcid.org/0000-0003-2789-7973)
- H. H. He
- Jianbei Qiu (ORCID: https://orcid.org/0000-0002-3699-3310)
- Chen Zou (ORCID: https://orcid.org/0000-0001-9638-6363)
- Lijing Zhong (ORCID: https://orcid.org/0000-0001-7567-8359)
- Cheng‐Wei Qiu (ORCID: https://orcid.org/0000-0002-6605-500X)
- Xiaofeng Liu (ORCID: https://orcid.org/0000-0003-2932-022X)
- Yuying Wang
- Xiangyu Sun (ORCID: https://orcid.org/0000-0001-8775-4670)
- Yihui Fu
- Zhemin Wu (ORCID: https://orcid.org/0000-0002-8840-3589)
- Zhi Chen
Institutions
- Kunming University of Science and Technology (CN)
- University of Pisa (IT)
- Ningbo University (CN)
- Piaggio (Italy) (IT)
- Kunming University (CN)
- Ningbo University of Technology (CN)
- National University of Singapore (SG)
- Southwest Medical University (CN)
- Zhejiang Lab (CN)
- Peng Cheng Laboratory (CN)
- Wuhan National Laboratory for Optoelectronics (CN)
- Huazhong University of Science and Technology (CN)
- Zhejiang University (CN)
- South China University of Technology (CN)
Publication Details
- Journal
- Nature Communications
- Published
- 2025-08-12
- DOI
- https://doi.org/10.1038/s41467-025-62426-1
- Citations
- 30
- Primary Topic
- Laser Material Processing Techniques
- Type
- article
- Field-Weighted Citation Impact
- 40.04
Funders
- Westlake University
- National Natural Science Foundation of China
- Zhejiang University
- South China University of Technology
- State Key Laboratory of Luminescent Materials and Devices
- Natural Science Foundation of Zhejiang Province