Simultaneous image stacks collection with continuous rotating-compensator of imaging ellipsometers

Single / dual rotating-compensator spectroscopic ellipsometers are widely used in the fields of thin-film characterization. The light signal collection is often carried on simultaneously during continuous rotation of the compensator. For rotating compensator imaging ellipsometers, imaging stacks are collected by detector arrays with millions of pixels, so that exposure time and frame readout time of whole arrays become carefully determined factors for fast image (data) acquisition. In this work, we introduce the method of image stacks collection for the imaging ellipsometers based on the rotatingcompensator principle.