Pathfinding for Molybdenum Hybrid Metallization

In this article, we demonstrate a pathfinding technique for evaluating hybrid metallization using Molybdenum (Mo) in via fills. We first configure a virtual process platform to evaluate mechanical stress and electrical performance of different metallization schemes. We then perform a regression analysis using Monte-Carlo simulation to determine the optimal via Mo profile that satisfies both stress and electrical targets. Using this technique, we can guide the development of future Mo hybrid metallization schemes.