Evaluation of Indium Contamination in CMOS Lines in Context of Superconducting Integrated Circuits
By establishing contamination management concepts for indium and designing specialized cleaning strategies, this study effectively demonstrates the successful integration of metallic indium as material for superconducting integrated circuits in a CMOS line. The research work illustrates the successful deposition of indium bumps, paving the way for standardized applications in future developments, including the bonding of quantum computer chips.
Authors
- Nora Haufe
- R. Krause (ORCID: https://orcid.org/0009-0004-9173-4655)
- Benjamin Uhlig (ORCID: https://orcid.org/0009-0003-9850-2323)
- Marcus Wislicenus (ORCID: https://orcid.org/0009-0005-2678-8144)
- Annika Franziska Wandesleben (ORCID: https://orcid.org/0009-0003-5051-7673)
- Carla Vogt (ORCID: https://orcid.org/0000-0002-6711-0103)
- Elena Schrötke
Institutions
- Fraunhofer Institute for Photonic Microsystems (DE)
- TU Bergakademie Freiberg (DE)
Publication Details
- Published
- 2025-06-23
- DOI
- https://doi.org/10.1109/icicdt65192.2025.11078065
- Primary Topic
- Advancements in Semiconductor Devices and Circuit Design
- Type
- article
- Field-Weighted Citation Impact
- 0.00