Optical Path Design of an Integrated Cavity Optomechanical Accelerometer with Strip Waveguides

To improve the efficiency and stability of the system, this paper proposes a monolithic integrated optical path design for a cavity optomechanical accelerometer based on a 250 nm top silicon thickness silicon-on-insulator (SOI) wafer instead of readout through U-shape fiber coupling. Finite Element Analysis (FEA) and Finite-Difference Time-Domain (FDTD) methods are employed to systematically investigate the performance of key optical structures, including the resonant modes and bandgap characteristics of photonic crystal (PhC) microcavities, transmission loss of strip waveguides, coupling efficiency of tapered-lensed fiber-to-waveguide end-faces, coupling characteristics between strip waveguides and PhC waveguides, and the coupling mechanism between PhC waveguides and microcavities. Simulation results demonstrate that the designed PhC microcavity achieves a quality factor (Q-factor) of 2.26 × 105 at a 1550 nm wavelength while the optimized strip waveguide exhibits a low loss of merely 0.2 dB over a 5000 μm transmission length. The strip waveguide to PhC waveguide coupling achieves 92% transmittance at the resonant frequency, corresponding to a loss below 0.4 dB. The optimized edge coupling structure exhibits a transmittance of 75.8% (loss < 1.2 dB), with a 30 μm coupling length scheme (60% transmittance, ~2.2 dB loss) ultimately selected based on process feasibility trade-offs. The total optical path system loss (input to output) is 5.4 dB. The paper confirms that the PhC waveguide–microcavity evanescent coupling method can effectively excite the target cavity mode, ensuring optomechanical coupling efficiency for the accelerometer. This research provides theoretical foundations and design guidelines for the fabrication of high-precision monolithic integrated cavity optomechanical accelerometers.