Formation of LIPSS on GaAs in Water Using Vector Laser Beams

We present the results of measurements of the Laser-Induced Periodic Surface Structures (LIPSS) produced on the surface of GaAs submersed in water. The linear structures were formed using the 532 nm, 30 ps laser pulses by moving the sample in the focal plane of the focused laser beam. S-waveplate was used to transform the linearly polarized Gaussian beam into radially or azimuthally polarized helical beams. The morphological measurements using scanning electron microscopy were used to define the optimal parameters of laser radiation for various LIPSS formation. These results are useful for further investigation of LIPSS formation using the vector beams possessing different polarization states. The processed GaAs surface exhibits specific functional properties beneficial for the applications in various areas.