Process Insights into 3D-DRAM with Vertical Bit Line and Scalable GAA Transistor
A novel 3D-DRAM integration flow with vertical bit line and gate-all-around (GAA) transistor is successfully demonstrated. The process modules are thoroughly described along with the challenges and optimization. The morphological integrity and electrical functionality of GAA select transistors with monocrystalline Si channel are demonstrated. TCAD modeling predicts scaling possibilities with this architecture, corroborating its suitability for future DRAM implementation.
Authors
- Subhali Subhechha (ORCID: https://orcid.org/0000-0002-1960-5136)
- Pierre Eyben (ORCID: https://orcid.org/0000-0003-3686-556X)
- Yaksh Rawal
- Roger Loo (ORCID: https://orcid.org/0000-0003-3513-6058)
- Loris Angelo Labbate (ORCID: https://orcid.org/0009-0003-8372-3713)
- Tobias Peissker
- Wouter Devulder (ORCID: https://orcid.org/0000-0002-5156-0177)
- Emmanuel Dupuy
- D. Crotti
- Erik Rosseel (ORCID: https://orcid.org/0000-0002-2737-8391)
- Insup Lee (ORCID: https://orcid.org/0000-0003-2672-1132)
- Alexey Milenin
- Hyungrock Oh (ORCID: https://orcid.org/0000-0001-5244-5755)
- Antoine Pacco (ORCID: https://orcid.org/0000-0001-6330-5053)
- A. Fantini (ORCID: https://orcid.org/0000-0002-3220-8856)
- Attilio Belmonte (ORCID: https://orcid.org/0000-0002-3947-1948)
- Eduardo Fernández Canga
- Nouredine Rassoul (ORCID: https://orcid.org/0000-0001-9489-3396)
- Geert Eneman (ORCID: https://orcid.org/0000-0002-5849-3384)
- Gouri Sankar Kar (ORCID: https://orcid.org/0000-0003-3122-4237)
- R. Ritzenthaler (ORCID: https://orcid.org/0000-0002-8615-3272)
- Matteo Beggiato
- Jae Min Kim (ORCID: https://orcid.org/0000-0002-9397-7130)
- Arvind Sharma (ORCID: https://orcid.org/0000-0002-9250-9642)
- Yong Jiang (ORCID: https://orcid.org/0000-0001-5535-4293)
- Jana Loyo Prado
- Jérôme Mitard (ORCID: https://orcid.org/0000-0002-7422-079X)
- Hemant Kumar Raut
Institutions
- IMEC (BE)
Publication Details
- Published
- 2025-06-08
- DOI
- https://doi.org/10.23919/vlsitechnologyandcir65189.2025.11075009
- Citations
- 1
- Primary Topic
- Semiconductor materials and devices
- Type
- article
- Field-Weighted Citation Impact
- 0.73
Funders
- Key Digital Technologies Joint Undertaking