GAA Backside-Power eFuse with 0.72um2 Bitcell, 1.59V Field Program, On-Demand Read and 1.8V Standby

A 4Kb eFuse IP featuring the smallest 0.72um2 bit cell is presented in the first Gate All Around (GAA) and backside power delivery 18A class process. A low leakage integrated power switch is developed to support an always-ON 1.8V rail with power sequence independent nominal and 1.8V rails. The IP enables 1.59V charge-pump-free in-field programming and 0.58V 1e9 cycles for on-demand read from −40°C to 125°C with a raw bit fail rate <3 DPM (defect per million), achieving 100% post-repair die yield with up to one billion bits per die.

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Publication Details

Published
2025-06-08
DOI
https://doi.org/10.23919/vlsitechnologyandcir65189.2025.11075045
Primary Topic
Energy Harvesting in Wireless Networks
Type
article
Field-Weighted Citation Impact
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article

GAA Backside-Power eFuse with 0.72um2 Bitcell, 1.59V Field Program, On-Demand Read and 1.8V Standby

Yao‐Feng Chang, S. Kulkarni, Eric Karl, Atresh Sanne et al.
Energy Harvesting in Wireless Networks
article

GAA Backside-Power eFuse with 0.72um2 Bitcell, 1.59V Field Program, On-Demand Read and 1.8V Standby

Yao‐Feng Chang, S. Kulkarni, Eric Karl, Atresh Sanne, Mohammad M. Hasan, Stafford Hutchins, Z Chen, Rui Ma
article en

Abstract

A 4Kb eFuse IP featuring the smallest 0.72um2 bit cell is presented in the first Gate All Around (GAA) and backside power delivery 18A class process. A low leakage integrated power switch is developed to support an always-ON 1.8V rail with power sequence independent nominal and 1.8V rails. The IP enables 1.59V charge-pump-free in-field programming and 0.58V 1e9 cycles for on-demand read from −40°C to 125°C with a raw bit fail rate <3 DPM (defect per million), achieving 100% post-repair die yield with up to one billion bits per die.

Intel (United States) (US)
Affordable and clean energy
Openalex Percentile: Top 82%
Energy Harvesting in Wireless Networks
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GAA Backside-Power eFuse with 0.72um2 Bitcell, 1.59V Field Program, On-Demand Read and 1.8V Standby — Yao‐Feng Chang, S. Kulkarni, et al. · (2025) | TGRS Research Map | TGRS