A 131-dBSPL AOP 66.3-dB SNR 105.7-$\mu$ A-Standby All-Dynamic Digital Microphone with Self-Clocked Interference-Resilient Acoustic Activity Detection

This paper presents a 103.3dB-dynamic-range all-dynamic digital CMOS-MEMS microphone with internal acoustic activity detection (AAD). A voltage-boosting dynamic analog front end (VB-DAFE) is proposed to allow linear scaling of supply current with operating frequency and extend dynamic range (DR) under 1.8 V system supply. Besides, an event driven (ED) zoom analog-to-digital converter (zoom-ADC) is proposed to handle large output swing from the VB-DAFE. The VB DAFE and zoom-ADC allow the system to operate in an all dynamic manner, enabling scalable power with operating frequency, suitable for ED operations. Under a 1.8 V supply, this work achieves an acoustic overload point (AOP) of 131 dBSPL, a signal-to-noise (SNR) of 66.3 dB and a standby current of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$105.7 \mu ~\mathrm{A}$</tex> with internal self-clocked interference resilient AAD.

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Publication Details

Published
2025-06-08
DOI
https://doi.org/10.23919/vlsitechnologyandcir65189.2025.11074984
Primary Topic
Advanced MEMS and NEMS Technologies
Type
article
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article

A 131-dBSPL AOP 66.3-dB SNR 105.7-$\mu$ A-Standby All-Dynamic Digital Microphone with Self-Clocked Interference-Resilient Acoustic Activity Detection

Y. M. Chen, Yuxuan Luo, Yinan Wang, Bo Zhao et al.
Advanced MEMS and NEMS Technologies
article

A 131-dBSPL AOP 66.3-dB SNR 105.7-$\mu$ A-Standby All-Dynamic Digital Microphone with Self-Clocked Interference-Resilient Acoustic Activity Detection

Y. M. Chen, Yuxuan Luo, Yinan Wang, Bo Zhao, Qi Zhang, Jiaqi Dong
article en

Abstract

This paper presents a 103.3dB-dynamic-range all-dynamic digital CMOS-MEMS microphone with internal acoustic activity detection (AAD). A voltage-boosting dynamic analog front end (VB-DAFE) is proposed to allow linear scaling of supply current with operating frequency and extend dynamic range (DR) under 1.8 V system supply. Besides, an event driven (ED) zoom analog-to-digital converter (zoom-ADC) is proposed to handle large output swing from the VB-DAFE. The VB DAFE and zoom-ADC allow the system to operate in an all dynamic manner, enabling scalable power with operating frequency, suitable for ED operations. Under a 1.8 V supply, this work achieves an acoustic overload point (AOP) of 131 dBSPL, a signal-to-noise (SNR) of 66.3 dB and a standby current of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$105.7 \mu ~\mathrm{A}$</tex> with internal self-clocked interference resilient AAD.

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Advanced MEMS and NEMS Technologies
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A 131-dBSPL AOP 66.3-dB SNR 105.7-$\mu$ A-Standby All-Dynamic Digital Microphone with Self-Clocked Interference-Resilient Acoustic Activity Detection — Y. M. Chen, Yuxuan Luo, et al. · (2025) | TGRS Research Map | TGRS