A 131-dBSPL AOP 66.3-dB SNR 105.7-$\mu$ A-Standby All-Dynamic Digital Microphone with Self-Clocked Interference-Resilient Acoustic Activity Detection
This paper presents a 103.3dB-dynamic-range all-dynamic digital CMOS-MEMS microphone with internal acoustic activity detection (AAD). A voltage-boosting dynamic analog front end (VB-DAFE) is proposed to allow linear scaling of supply current with operating frequency and extend dynamic range (DR) under 1.8 V system supply. Besides, an event driven (ED) zoom analog-to-digital converter (zoom-ADC) is proposed to handle large output swing from the VB-DAFE. The VB DAFE and zoom-ADC allow the system to operate in an all dynamic manner, enabling scalable power with operating frequency, suitable for ED operations. Under a 1.8 V supply, this work achieves an acoustic overload point (AOP) of 131 dBSPL, a signal-to-noise (SNR) of 66.3 dB and a standby current of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$105.7 \mu ~\mathrm{A}$</tex> with internal self-clocked interference resilient AAD.
Authors
- Y. M. Chen (ORCID: https://orcid.org/0009-0004-3995-2049)
- Yuxuan Luo (ORCID: https://orcid.org/0000-0002-9819-0660)
- Yinan Wang
- Bo Zhao (ORCID: https://orcid.org/0000-0001-9357-3120)
- Qi Zhang (ORCID: https://orcid.org/0000-0003-0403-2600)
- Jiaqi Dong (ORCID: https://orcid.org/0000-0002-6694-3453)
Institutions
- Zhejiang University (CN)
Publication Details
- Published
- 2025-06-08
- DOI
- https://doi.org/10.23919/vlsitechnologyandcir65189.2025.11074984
- Primary Topic
- Advanced MEMS and NEMS Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00