A 1 ppb MEMS Oscillator Achieving -90 dBc/Hz at 10 Hz Offset Enabled by 5 M $\Omega$ TIA and 360° Phase Shifter
This paper presents a fully integrated MEMS oscillator incorporating a low-noise high gain TIA, tunable phase shifter, and drive control circuit. It is fabricated in 65 nm CMOS and features a 115–134 <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{dB}\Omega, 81\text{fA}/\sqrt{\text{Hz}}$</tex> TIA, a 360° phase shifter, and a 10mV - 200 mV drive control circuit. Leveraging a high Q electrostatic MEMS resonator, the oscillator achieves -90 dBc/Hz phase noise at a 10Hz offset.
Authors
- M. Aly (ORCID: https://orcid.org/0009-0009-7046-9369)
- Gabrielle D. Vukasin (ORCID: https://orcid.org/0000-0002-4301-1880)
- Saurabh Saxena (ORCID: https://orcid.org/0000-0001-5592-054X)
- Ji Feng Shi (ORCID: https://orcid.org/0000-0002-0856-1860)
- Ruhao Xia (ORCID: https://orcid.org/0000-0003-3694-0160)
- Rakibul Islam (ORCID: https://orcid.org/0000-0002-6406-2919)
- Gaurav Bahl (ORCID: https://orcid.org/0000-0001-7801-2739)
- Mohamed Badr Younis (ORCID: https://orcid.org/0009-0008-7531-1360)
- Ahmed Abdelrahman (ORCID: https://orcid.org/0000-0002-1260-7155)
- Hyun-Keun Kwon (ORCID: https://orcid.org/0000-0003-2570-287X)
- Pavan Kumar Hanumolu (ORCID: https://orcid.org/0000-0002-3456-2082)
- Mahmoud A. Khalil (ORCID: https://orcid.org/0009-0002-2168-0001)
- Jintark Kim
- Yongxin Li (ORCID: https://orcid.org/0000-0003-3812-9793)
- Jie Yan (ORCID: https://orcid.org/0000-0003-1691-4002)
- Thomas W. Kenny
- A. S. Hegazi
- Mohamed Osama Selim (ORCID: https://orcid.org/0009-0001-8965-6457)
- Karim Elmeligy
Institutions
- University of Illinois Urbana-Champaign (US)
- Stanford University (US)
Publication Details
- Published
- 2025-06-08
- DOI
- https://doi.org/10.23919/vlsitechnologyandcir65189.2025.11075175
- Citations
- 1
- Primary Topic
- Advanced MEMS and NEMS Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.73