Compact, Low-Loss, Cost-Effective, CMOS Embedded RF Switch Solution Achieving DC-100GHz True-Time Delay Phase Shifter by Phase Change Material

The study presents phase change material (PCM) RF switch (RFS) in single pole double throw (SPDT), demonstrating insertion loss (IL) of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$&gt;-1.6 \text{dB}$</tex> and isolation (ISO) of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$&lt;-34 \text{dB}$</tex> for wideband across 10 GHz to 100 GHz. The low-loss and series-only PCM SPDT is further embedded with delay lines to demonstrate a 3-bit true-time delay (TTD) phase shifter, exhibiting superior performances in <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$&lt;1.03 \text{dB}$</tex> and <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$&lt;1.28 \text{ps}$</tex> RMS amplitude and group delay errors. This is the BEOL technology and can be the embedded CMOS solutions, offering advantages in high performances (Ron*Coff<12fs), cost-effective (Bulk Si substate) and small area (Series-only SPDT) to Silicon-on-Insulator (SOI) CMOS RF switch.