DERMIS: A Flexible Fully-Integrated $\mathbf{6 0 0} \bm{\mu} \mathbf{m}$-Resolution Per-Taxel Slip-to-Spikes Tactile Sensor Readout on A-IGZO TFT for Large-Area High-Density Electronic Skins

This work is the first demonstration of a flexible fullyintegrated tactile sensor readout ASIC with 1) per-taxel eventbased readout on a large-area unipolar amorphous indium gallium zinc oxide (a-IGZO) thin-film transistor (TFT) technology; 2) enabling the integration of differential capacitive sensors with state-of-art <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$600 \mu ~\mathrm{m}$</tex> pitch for high-spatial-resolution shear and normal force sensing; 3) allowing the direct acquisition of crucial grasp-state-dependent parameters (e.g., slip); while 4) achieving state-of-the-art performance compared to both prior TFT-based readouts (<tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$F O M_{w}=4 n J / c-s; 0.6 f_{\text {RMS }}$</tex> resolution) and tactile sensors.