Orthogonal $\mathbf{V}_{\mathbf{T}}$ Tuning for Oxide Semiconductor 2T Gain Cell Enabled by Interface Dipole Engineering

We demonstrate interface engineering (eng.) of the gate dielectric as an independent knob to tune the threshold voltage <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(V_T)$</tex> of Oxide Semiconductor (OS) FETs for twotransistor (2T) gain-cell memories (GC). By leveraging Interface Dipole (ID) eng. for Indium-Tungsten-Oxide (IWO) FETs, we achieve a <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\sim 450-500 \text{mV} V_T$</tex> increase compared to the standard <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{HfO}_2$</tex> (STD), maintaining this <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\Delta V_T$</tex> from 8°C to cryogenic temperatures. ID engineered (ID engd.) GCs exhibit good reliability, showing a ~60 mV shift under worst-case DC positive-bias stress (PBS) at 85°C. This approach is demonstrated across other OS such as Indium-Oxide, Indium-Tin-Oxide, and Indium-Gallium-Zinc-Oxide and at short channel lengths (sub-100 nm). Finally, simulations indicate that ID <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$V_T$</tex> tuning reduces GC refresh energy by <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\sim 50,000 \times$</tex> compared to STD, enabling energy-efficient GC.

Authors

Institutions

Publication Details

Published
2025-06-08
DOI
https://doi.org/10.23919/vlsitechnologyandcir65189.2025.11074922
Citations
3
Primary Topic
Semiconductor materials and devices
Type
article
Field-Weighted Citation Impact
2.19

Funders

Controls
|||
ALL TIME
JAN
FEB
MAR
APR
MAY
JUN
JUL
AUG
SEP
OCT
article

Orthogonal $\mathbf{V}_{\mathbf{T}}$ Tuning for Oxide Semiconductor 2T Gain Cell Enabled by Interface Dipole Engineering

Chen Huang, Nathaniel S. Safron, Kamalesh Jana, Jonathan Hartanto et al.
3 citations
Semiconductor materials and devices
2.19
article

Orthogonal $\mathbf{V}_{\mathbf{T}}$ Tuning for Oxide Semiconductor 2T Gain Cell Enabled by Interface Dipole Engineering

Chen Huang, Nathaniel S. Safron, Kamalesh Jana, Jonathan Hartanto, M. Passlack, Donglai Zhong, Fabia F. Athena, Qing Lin, Paul C. McIntyre, Iuliana Radu, Jiheong Kang, H.‐S. Philip Wong, Balreen Saini, Xijie Wang, Gregory Pitner, Didem Dede, Shuhan Liu, Hongyu Chen, Ethan Boneh, K. Leitherer
article en
3 citations

Abstract

We demonstrate interface engineering (eng.) of the gate dielectric as an independent knob to tune the threshold voltage <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(V_T)$</tex> of Oxide Semiconductor (OS) FETs for twotransistor (2T) gain-cell memories (GC). By leveraging Interface Dipole (ID) eng. for Indium-Tungsten-Oxide (IWO) FETs, we achieve a <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\sim 450-500 \text{mV} V_T$</tex> increase compared to the standard <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{HfO}_2$</tex> (STD), maintaining this <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\Delta V_T$</tex> from 8°C to cryogenic temperatures. ID engineered (ID engd.) GCs exhibit good reliability, showing a ~60 mV shift under worst-case DC positive-bias stress (PBS) at 85°C. This approach is demonstrated across other OS such as Indium-Oxide, Indium-Tin-Oxide, and Indium-Gallium-Zinc-Oxide and at short channel lengths (sub-100 nm). Finally, simulations indicate that ID <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$V_T$</tex> tuning reduces GC refresh energy by <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\sim 50,000 \times$</tex> compared to STD, enabling energy-efficient GC.

Taiwan Semiconductor Manufacturing Company (Taiwan) (TW), Stanford University (US)
Stanford SystemX Alliance, Taiwan Semiconductor Manufacturing Company
Openalex Percentile: Top 11%
Semiconductor materials and devices
2.19
AI Navigator

Ask Laika to Summarize, Analyze, and Connect papers live on the map.

Summarize Papers & Methodologies

Extract key findings, datasets, and comparative methods across publications.

Benchmark Rankings & Visual Analytics

Rank top research institutions, authors, funders, topics, and journals by Field-Weighted Citation Impact (FWCI) and paper volume with instant charts.

Connect Distant Disciplines

Bridge topological clusters on the map to find hidden collaborative intersections.