Orthogonal $\mathbf{V}_{\mathbf{T}}$ Tuning for Oxide Semiconductor 2T Gain Cell Enabled by Interface Dipole Engineering
We demonstrate interface engineering (eng.) of the gate dielectric as an independent knob to tune the threshold voltage <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(V_T)$</tex> of Oxide Semiconductor (OS) FETs for twotransistor (2T) gain-cell memories (GC). By leveraging Interface Dipole (ID) eng. for Indium-Tungsten-Oxide (IWO) FETs, we achieve a <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\sim 450-500 \text{mV} V_T$</tex> increase compared to the standard <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{HfO}_2$</tex> (STD), maintaining this <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\Delta V_T$</tex> from 8°C to cryogenic temperatures. ID engineered (ID engd.) GCs exhibit good reliability, showing a ~60 mV shift under worst-case DC positive-bias stress (PBS) at 85°C. This approach is demonstrated across other OS such as Indium-Oxide, Indium-Tin-Oxide, and Indium-Gallium-Zinc-Oxide and at short channel lengths (sub-100 nm). Finally, simulations indicate that ID <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$V_T$</tex> tuning reduces GC refresh energy by <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\sim 50,000 \times$</tex> compared to STD, enabling energy-efficient GC.
Authors
- Chen Huang (ORCID: https://orcid.org/0000-0002-7864-8427)
- Nathaniel S. Safron
- Kamalesh Jana (ORCID: https://orcid.org/0000-0003-0819-5183)
- Jonathan Hartanto (ORCID: https://orcid.org/0000-0002-0507-9200)
- M. Passlack (ORCID: https://orcid.org/0000-0003-3654-2250)
- Donglai Zhong (ORCID: https://orcid.org/0000-0002-0876-414X)
- Fabia F. Athena (ORCID: https://orcid.org/0000-0002-1985-7368)
- Qing Lin (ORCID: https://orcid.org/0000-0002-9274-348X)
- Paul C. McIntyre (ORCID: https://orcid.org/0000-0002-7498-831X)
- Iuliana Radu (ORCID: https://orcid.org/0000-0002-7230-7218)
- Jiheong Kang (ORCID: https://orcid.org/0000-0003-4446-5494)
- H.‐S. Philip Wong (ORCID: https://orcid.org/0000-0002-0096-1472)
- Balreen Saini (ORCID: https://orcid.org/0000-0003-0050-2775)
- Xijie Wang (ORCID: https://orcid.org/0000-0003-3324-4709)
- Gregory Pitner (ORCID: https://orcid.org/0000-0002-0518-3745)
- Didem Dede (ORCID: https://orcid.org/0000-0002-9158-8764)
- Shuhan Liu (ORCID: https://orcid.org/0000-0001-5705-565X)
- Hongyu Chen (ORCID: https://orcid.org/0000-0002-5325-9249)
- Ethan Boneh
- K. Leitherer
Institutions
- Taiwan Semiconductor Manufacturing Company (Taiwan) (TW)
- Stanford University (US)
Publication Details
- Published
- 2025-06-08
- DOI
- https://doi.org/10.23919/vlsitechnologyandcir65189.2025.11074922
- Citations
- 3
- Primary Topic
- Semiconductor materials and devices
- Type
- article
- Field-Weighted Citation Impact
- 2.19
Funders
- Stanford SystemX Alliance
- Taiwan Semiconductor Manufacturing Company