One-Step Fabrication of Mirco-Mirror Based 3D Polymer Optical Link for Co-Packaged Optics Using Imprint Technology
Optical link among components on a board is key technology to achieve co-packaged optics. In this study, we demonstrated simultaneous fabrication of 3D optical link composed of micro-mirrors and polymer waveguides by imprint process. Using a high-precision mold patterned by two-photonpolymerization 3D printing without replication, 45-degree-angled mirrors with 40 waveguides were stably fabricated in single imprint process, achieving a standard deviation of 0.467 degrees.
Authors
- Akihiro Noriki (ORCID: https://orcid.org/0000-0003-1220-2171)
- Takayuki Kurosu (ORCID: https://orcid.org/0000-0002-4728-6240)
- Fumi Nakamura (ORCID: https://orcid.org/0000-0001-8728-8016)
- Satoshi Suda (ORCID: https://orcid.org/0000-0002-7242-2005)
- Kenta Suzuki (ORCID: https://orcid.org/0000-0003-4354-908X)
- Takeru Amano (ORCID: https://orcid.org/0000-0002-4006-0716)
Institutions
- National Institute of Advanced Industrial Science and Technology (JP)
Publication Details
- Published
- 2025-06-16
- DOI
- https://doi.org/10.1109/oip65843.2025.11081574
- Primary Topic
- Nanofabrication and Lithography Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00