Effect of negative bias potential on stability of low-temperature plasma process
The results of the study of processes leading to the emergence of unstable interaction of a low-temperature plasma gas discharge with the surface of a metal product to which a negative bias potential is applied are presented. It is shown that the cause of instability is associated with the appearance of an unstable equilibrium position in the discharge at certain values of the potential as a consequence of the violation of quasi-neutrality.
Authors
- V.V. Martynov
- B.M. Brzhozovsky
- Е. П. Зинина
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.36652/1813-1336-2025-21-7-310-313
- Primary Topic
- Metal and Thin Film Mechanics
- Type
- article
- Field-Weighted Citation Impact
- 0.00