Genetic Algorithm-Based Approach for Mask Design Generation in Wet Etching Silicon Corrosion

Computer-Aided Design and Applications is an international journal on the applications of CAD and CAM. It publishes papers in the general domain of CAD plus in emerging fields like bio-CAD, nano-CAD, soft-CAD, garment-CAD, PLM, PDM, CAD data mining, CAD and the internet, CAD education, genetic algorithms and CAD engines. The journal is aimed at all developers and users of CAD technology to ptovide CAD solutions for various stages of design and manufacturing. The journal publishes all about Computer-Aided Design and Computer-Aided technologies.

Authors

Publication Details

Journal
Computer-Aided Design and Applications
Published
2025-08-04
DOI
https://doi.org/10.14733/cadaps.2026.162-179
Primary Topic
Advanced Machining and Optimization Techniques
Type
article
Field-Weighted Citation Impact
0.00

Funders

Controls
|||
ALL TIME
JAN
FEB
MAR
APR
MAY
JUN
JUL
AUG
SEP
OCT
article

Genetic Algorithm-Based Approach for Mask Design Generation in Wet Etching Silicon Corrosion

Thiago de Castro Martins, Marcos de Sales Guerra Tsuzuki, Ana Paula Rehder
Computer-Aided Design and Applications
Advanced Machining and Optimization Techniques
article

Genetic Algorithm-Based Approach for Mask Design Generation in Wet Etching Silicon Corrosion

Thiago de Castro Martins, Marcos de Sales Guerra Tsuzuki, Ana Paula Rehder
article en

Abstract

Computer-Aided Design and Applications is an international journal on the applications of CAD and CAM. It publishes papers in the general domain of CAD plus in emerging fields like bio-CAD, nano-CAD, soft-CAD, garment-CAD, PLM, PDM, CAD data mining, CAD and the internet, CAD education, genetic algorithms and CAD engines. The journal is aimed at all developers and users of CAD technology to ptovide CAD solutions for various stages of design and manufacturing. The journal publishes all about Computer-Aided Design and Computer-Aided technologies.

Computer-Aided Design and Applications
National Natural Science Foundation of China, Dalian University of Technology, Fundamental Research Funds for the Central Universities
Openalex Percentile: Top 82%
Advanced Machining and Optimization Techniques
AI Navigator

Ask Laika to Summarize, Analyze, and Connect papers live on the map.

Summarize Papers & Methodologies

Extract key findings, datasets, and comparative methods across publications.

Benchmark Rankings & Visual Analytics

Rank top research institutions, authors, funders, topics, and journals by Field-Weighted Citation Impact (FWCI) and paper volume with instant charts.

Connect Distant Disciplines

Bridge topological clusters on the map to find hidden collaborative intersections.