Amorphous Oxide Semiconductors for Memory Applications

IGZO-TFTs are now becoming de facto standard of the backplane to drive flat panel displays and their application is expanding to various sensors and imagers. Recently memory application coupled with Si-CMOS is now attracting much attention utilizing extremely low off-current. Amorphous oxide semiconductors (AOS) represented by IGZO are rather different in various aspects from conventional semiconductors. Introduced are the fundamental properties of AOS and AOS-TFTs in comparison with Si-based TFTs.