Multilayer Integration Platform for Dense Optical Phased Arrays
In this paper, we present the development of a multilayer silicon-silicon nitride platform for dense optical phased arrays. We demonstrate the viability of this platform achieving low propagation losses of 1.3 dB/cm and 2.55 dB/com for single mode waveguides realized in the silicon and silicon nitride layers, respectively.
Authors
- Daniele Melati (ORCID: https://orcid.org/0000-0002-3427-0186)
- Éric Cassan (ORCID: https://orcid.org/0000-0003-2802-7689)
- Jean‐René Coudevylle (ORCID: https://orcid.org/0009-0004-7299-1592)
- Carlos A. Alonso-Ramos
- Sarra Salhi
Institutions
- Centre National de la Recherche Scientifique (FR)
- Centre de Nanosciences et de Nanotechnologies (FR)
Publication Details
- Published
- 2025-05-20
- DOI
- https://doi.org/10.1109/pn66844.2025.11097134
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00