Investigation of Asymmetric Ferroelectric Switching in AlScN MFM Capacitors
The asymmetric ferroelectric switching between positive and negative voltage application of AlScN-based MFM capacitors was investigated. From the time-dependent switching characteristics, the switching under positive voltage followed nucleation-limited switching, whereas switching under negative voltage followed the KAI model. The origin of the difference was attributed to the presence of an unswitched region at the bottom of the film.
Authors
- Takuya Hoshii (ORCID: https://orcid.org/0000-0002-2873-8715)
- Kuniyuki Kakushima (ORCID: https://orcid.org/0000-0002-8527-1402)
- Hirofumi Nishida
- Hitoshi Wakabayashi (ORCID: https://orcid.org/0000-0001-5509-521X)
- Si-Meng Chen (ORCID: https://orcid.org/0000-0001-7714-6129)
- Kazuo Tsutsui (ORCID: https://orcid.org/0000-0002-5472-5539)
Institutions
- Tokyo Institute of Technology (JP)
Publication Details
- Published
- 2025-06-08
- DOI
- https://doi.org/10.23919/snw65111.2025.11097250
- Primary Topic
- Acoustic Wave Resonator Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00