Bimetal Surface Plasmon Waveguide Biosensors with Deep On-Chip Microfluidics
The design and fabrication of plasmonic biosensors utilizing bimetal LRSPP (long-range surface plasmon polariton) waveguides are presented. The fabrication process facilitates mass production of biosensor chips incorporating deep channel microfluidics for lab-on-a-chip applications employing techniques such as reactive ion etching and wafer bonding.
Authors
- Pierre Berini (ORCID: https://orcid.org/0000-0002-6795-7275)
- Deepthi Sekhar
Institutions
- University of Ottawa (CA)
Publication Details
- Published
- 2025-05-20
- DOI
- https://doi.org/10.1109/pn66844.2025.11097122
- Primary Topic
- Nanofabrication and Lithography Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00