Experimental Demonstration of High-Efficiency Silicon Nitride Grating Couplers for O-Band Applications
Silicon nitride offers a broad transparency window and low losses that make it a complementary alternative to silicon-on-insulator. The moderate refractive index contrast of the silicon nitride platform reduces the efficiency of fibre-chip coupling devices. This study presents high-efficiency grating couplers designed for the 1310 nm wavelength regions. Our devices are compatible with a single full-etch step fabrication process. Enhanced performance is predicted through subwavelength metamaterial apodization and beam focalization.
Authors
- Pavel Cheben (ORCID: https://orcid.org/0000-0003-4232-9130)
- Shurui Wang
- Daniel Benedikovič (ORCID: https://orcid.org/0000-0002-2239-0041)
- William D. Fraser (ORCID: https://orcid.org/0000-0001-9042-2415)
- Winnie N. Ye (ORCID: https://orcid.org/0000-0003-2817-4531)
- Radovan Korček
- Jens H. Schmid (ORCID: https://orcid.org/0000-0003-3508-7428)
- Rubin Ma
- Cameron Horvath
- Martin Vachon
Institutions
- University of Žilina (SK)
- Applied Nanotools (Canada) (CA)
- National Research Council Canada (CA)
- Carleton University (CA)
Publication Details
- Published
- 2025-05-20
- DOI
- https://doi.org/10.1109/pn66844.2025.11097132
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- Natural Sciences and Engineering Research Council of Canada